Real-time reflectance anisotropy spectroscopy of MBE AlAs/GaAs interfaces
Conference Paper
-
- Overview
-
- Research
-
- Identity
-
- Additional Document Info
-
- View All
-
Overview
abstract
-
We report on a study of the first stages of the MBE growth of AlAs/GaAs by real-time Reflectance anisotropy spectroscopy and Singular Value Decomposition analysis of spectroscopy line shapes. © OSA 2014.
publication date
published in
Research
keywords
-
Aluminum arsenide; Anisotropy; Photonics; Reflection; Singular value decomposition; Line shape; MBE growth; Real time; Reflectance anisotropy spectroscopy; Singular value decomposition analysis; III-V semiconductors
Identity
Digital Object Identifier (DOI)
Additional Document Info