abstract

• Reflectance Difference Spectroscopy (RDS) is a powerful tool for the optical characterization of cubic semiconductors. Several physical mechanisms have been identified to contribute to the RDS signal. Among these we can count on surface electric fields, lineal defects, and surface strains. The RDS setups reported so far, use photodiodes and photomultipliers as light detectors and lock-in techniques to process the signal. In the present work we describe a new instrument based on a charged-coupled device (CCD) as light detector. By focusing the light on the CCD, it is possible to obtain the RD spectra coming from different regions of the semiconductor surface, by analyzing the spectra for a group of pixels of the CCD. The instrument can be used to obtain a topographic map of the surface of the semiconductor.

authors

• Balderas Navarro Raúl Eduardo
• Castro García Ricardo
• Lastras Martínez Alfonso
• Lastras Martínez Luis Felipe

publication date

• 2007-01-01

published in

• Proceedings of SPIE - The International Society for Optical Engineering  Proceedings

keywords

• CCD cameras; Electric fields; Light reflection; Photodetectors; Photodiodes; Photomultipliers; Semiconductor materials; Optical characterization; Reflectance difference spectrometers; Spectrometers

Digital Object Identifier (DOI)

• 10.1117/12.742346

start page

end page

volume

• 6422