abstract

• The molecular beam epitaxial growth and physical properties of In graded-composition layers of InGaAs on GaAs (100) substrates varying nominal In concentration from 12 to 97%25 and vice versa is analyzed along the growth front. The substrate temperature was varied as the In concentration was changed in order to propitiate the near-optimal growth conditions for the InGaAs alloy. Hyperbolic-tangent compositional gradients, from In-rich to Ga-rich alloys and vice versa, observed RHEED patterns characteristic of a flat surface during the growth. The HRXRD patterns showed clear diffraction peaks associated with the In concentration alloy at which the graded sample started, followed by a characteristic plateau of graded layers. The occurrence of dislocations in hyperbolic tangent gradients that relieve the strain up to a certain thickness is explored, reaching a nominal or an averaged lattice constant. © 2022 Elsevier Ltd

authors

• Belio-Manzano A.
• Compeán García Vicente Damían
• Cortes Mestizo Irving Eduardo
• Espinosa Vega Leticia Ithsmel
• Gallardo S.
• Gorbatchev Andrei
• Mercado-Ornelas C.A.
• Méndez García Víctor Hugo
• Perea-Parrales F.E.

publication date

• 2022-01-01

funding provided via

• Consejo Nacional de Ciencia y Tecnología, CONACYT; Universidad Autónoma de San Luis Potosí, UASLP  Grant

published in

• Materials Science in Semiconductor Processing  Journal

keywords

• Density dislocations; Hyperbolic tangent; Metamorphic layer; Molecular beam epitaxy Gallium arsenide; Hyperbolic functions; III-V semiconductors; Indium alloys; Molecular beams; Semiconducting gallium; Semiconducting indium; Semiconducting indium gallium arsenide; Semiconductor alloys; Semiconductor quantum wells; Substrates; X ray diffraction analysis; Composition-graded; Density dislocation; GaAs(1 0 0); Graded In; Graded-composition layer; Growth front; Hyperbolic tangent; Metamorphic layers; Molecular beam epitaxial growth; Molecular-beam epitaxy; Molecular beam epitaxy

Digital Object Identifier (DOI)

• 10.1016/j.mssp.2022.106486

PubMed ID

start page

end page

volume

• 142

issue