Structure and homoepitaxial growth of GaAs(6 3 1)

We have studied the surface atomic structure of GaAs(6 3 1), and the GaAs growth by molecular beam epitaxy (MBE) on this plane. After the oxide desorption process at 585 °C reflection high-energy electron diffraction (RHEED) showed along the [-1 2 0] direction a 2× surface reconstruction for GaAs(6 3 1)A, and a 1× pattern was observed for GaAs(6 3 1)B. By annealing the substrates for 60 min, we observed that on the A surface appeared small hilly-like features, while on GaAs(6 3 1)B surface pits were formed. For GaAs(6 3 1)A, 500 nm-thick GaAs layers were grown at 585 °C. The atomic force microscopy (AFM) images at the end of growth showed the self-formation of nanoscale structures with a pyramidal shape enlarged along the [5-9-3] direction. Transversal views of the bulk-truncated GaAs(6 3 1) surface model showed arrays of atomic grooves along this direction, which could influence the formation of the pyramidal structures. © 2006 Elsevier B.V. All rights reserved.

Atomic force microscopy; Molecular beam epitaxy; Nanostructures; Semiconducting III-V materials Crystal atomic structure; Molecular beam epitaxy; Reflection high energy electron diffraction; Surface structure; Nanoscale structures; Nanostructures; Pyramidal structures; Semiconducting III-V materials; Surface reconstruction; Semiconducting gallium arsenide

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