abstract

• The mechanical design, electronics and the control program developed in order to perform, automatically, the deposition of crystalline layers on substrates using the liquid phase epitaxy technique is described. The implementation of the system includes the hardware and control software of the substrate movements, the gas flow system, the temperature program and the monitoring of the main physical variables such as temperature, humidity, flow, pressure etc. The movement the substrate is done by means of a solenoid whose core is coupled to the slider of the graphite boat. This system was proposed in order to maintain the hermeticity of the system which is vital to achieve the epitaxial growth and to decrease the power of the electric motor that drives the solenoid. © 2012 IEEE.

authors

• De Anda Salazar Francisco Javier
• Sánchez-Niño F.

publication date

• 2012-01-01

published in

• CCE 2012 - 2012 9th International Conference on Electrical Engineering, Computing Science and Automatic Control  Proceedings

keywords

• control systems; Data acquisition: hardware and software; Liquid Phase Epitaxy; sensors Control program; Control software; Crystalline layers; Gas flow systems; Graphite boat; Hardware and software; Hermeticity; Mechanical design; Physical variables; Substrate movement; Automation; Control; Control systems; Crystal growth; Electrical engineering; Hardware; Liquid phase epitaxy; Process control; Sensors; Solenoids; Substrates; Humidity control

Digital Object Identifier (DOI)

• 10.1109/ICEEE.2012.6421203

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