Determination of the thermal conductivity of diamond-like nanocomposite films using a scanning thermal microscope Article uri icon


  • Amorphous diamond-like/quartz-like composites a-(C:H/Si:O) constitute a novel class of diamond-related materials with a number of unique bulk and surface properties. Using a thermal imaging microscope we have determined the thermal conductivity (κs) of a-(C:H/Si:O) films deposited on Si(001) substrates. We have developed a calibration procedure which makes it possible to use this method for the evaluation of not only topographical variations in κs but also absolute values. © 1998 American Institute of Physics.

publication date

  • 1998-01-01