A spectrometer for the measurement of reflectance-difference spectra Article uri icon

abstract

  • We describe a spectrometer (visible-ultraviolet photon energy range) for the measurement of reflectance-difference spectra of cubic semiconductors. The spectrometer employs a photoelastic modulator to modulate the polarization of the light incident on the sample and allows for a simple procedure to correct the measured spectra for parasitic components associated with such modulation. The instrument reported has a higher throughput than more conventional setups. To illustrate the spectrometer performance we report on reflectance-difference spectra of (001) oriented GaAs single crystals doped with silicon donors at a level of 1018/cm3.

publication date

  • 1993-01-01