Hydrogen detection in hydrogenated amorphous silicon by ion-induced Auger spectroscopy
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We present experimental results using ion-induced Auger spectroscopy on samples of hydrogenated amorphous silicon (a-Si:H) films. They show that there is a linear relationship between the amplitude ratio of the main characteristic peaks in the L2, 3 VV Auger transition of silicon and the hydrogen concentration in the a-Si:H film. © 1989, American Vacuum Society. All rights reserved.
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