High-speed deposition of oriented orthorhombic NaTaO3 films using laser chemical vapor deposition Article uri icon

abstract

  • We demonstrated the high-speed laser chemical vapor deposition of orthorhombic NaTaO3 (o-NaTaO3) films. The orientation of the o-NaTaO3 films was changed from (101) to (112) to (001) plane as the increase of deposition temperature from 823 to 913 K. o-NaTaO3 films had faceted surfaces and columnar cross sections. The deposition rates of o-NaTaO3 films were 48–120 µm h−1, which are 192–6000 times higher than those offered by wet-chemical routes. © 2016 Elsevier B.V.

publication date

  • 2016-01-01