abstract

• High crystalline layers of InN were grown on MgO(100) substrates by gas source molecular beam epitaxy. Good quality films were obtained by means of an in-plane rotation process induced by the annealing of an InN buffer layer to minimize the misfit between InN and MgO. In situ reflection high-energy electron diffraction showed linear streaky patterns along the [011̄0] azimuth and a superimposed diffraction along the [112̄0] azimuth, which correspond to a 30° α-InN film rotation. This rotation reduces the mismatch at the MgO/InN interface from 19.5%25 to less than 3.5%25, increasing the structural quality, which was analyzed by high-resolution X-ray diffraction and Raman spectroscopy. Only the (0002) c plane diffraction of α-InN was observed and was centered at 2θ = 31.4°. Raman spectroscopy showed two modes corresponding to the hexagonal phase: E1(LO) at 591 cm-1 and E2(high) at 488 cm-1. Hall effect measurements showed a carrier density of 9 × 1018 cm-3 and an electron Hall mobility of 340 cm2/(V s) for a film thickness of 140 nm. © 2014 AIP Publishing LLC.

authors

• Compeán García Vicente Damían
• Escobosa Echavarría A.
• López Luna Edgar
• Orozco Hinostroza I.E.
• Rodríguez Vázquez Ángel Gabriel
• Vidal Borbolla Miguel Angel

publication date

• 2014-01-01

published in

• Applied Physics Letters  Journal

keywords

• Gas source molecular beam epitaxy; Raman spectroscopy; X ray diffraction; Crystalline layers; Hall effect measurement; Hexagonal phase; High quality; High resolution X ray diffraction; Inplane rotation; Situ reflection; Structural qualities; Magnesia

Digital Object Identifier (DOI)

• 10.1063/1.4876760

start page

end page

volume

• 104

issue

• 19