Fabrication and thermal analysis of micro thermocouples for energy harvesting
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We present the thermal study of micro thermocouples fabricated by electron beam lithography process, the micro thermocouples (MTCs) are based on a recently discovered thermoelectric effect in single-metal nanostructures with cross-sectional discontinuity, single-metal MTCs would simplify the fabrication process and allow the large-scale production of these devices using fabrication technologies such as nanoimprint lithography. In this work, we have investigated the temperature difference between the asymmetric unions of the micro thermocouples using Optotherm EL InfraSight 320 thermal imaging camera. Results show that single-metal MTCs are promising structures that could be used to harvest thermal radiation and generate electric energy through the Seebeck effect. © 2017 SPIE.
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Electron beam lithography; Energy harvesting; Heat radiation; Infrared imaging; Lithography; Nanoimprint lithography; Thermoanalysis; Thermocouples; Electric energies; Fabrication process; Fabrication Technologies; Large scale productions; Metal nanostructure; Micro thermocouples; Temperature differences; Thermal imaging cameras; Fabrication
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