A corrected model for non-contact-type RF MEMS switches
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abstract
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This paper presents a corrected electric model for a novel non-contact-type radio-frequency (RF) microelectromechanical systems switch for high frequency applications (f > 24 GHz). This type of switches were proposed in the ref. [1], however in the electric model it is necessary considerer two resistors to have excellent agreement between simulation and experiment results. The proposed switch is a capacitive shunt type operated by the change of capacitance between the signal line and ground lines, the switch consists of a coplanar waveguide line and variable capacitors OFF to the ON state and 200 ps in the ON to the OFF state. The simulation results show a good agreement with our proposed electric circuit of the designed switch and experimental results. © 2016 IEEE.
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keywords
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Coplanar waveguides; Electromechanical devices; MEMS; Microstrip lines; Coplanar waveguide lines; Electric models; High-frequency applications; Non-contact type; Radio frequency microelectromechanical systems; RF-MEMS switches; Two-resistors; Variable capacitor; Electric switches
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