Stoichiometry Calculation in BaxSr1- xTiO3 Solid Solution Thin Films, Prepared by RF Cosputtering, Using X-Ray Diffraction Peak Positions and Boltzmann Sigmoidal Modelling
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A novel procedure based on the use of the Boltzmann equation to model the x parameter, the film deposition rate, and the optical band gap of BaxSr1-xTiO3 thin films is proposed. The BaxSr1-xTiO3 films were prepared by RF cosputtering from BaTiO3 and SrTiO3 targets changing the power applied to each magnetron to obtain different Ba/Sr contents. The method to calculate x consisted of fitting the angular shift of (110), (111), and (211) diffraction peaks observed as the density of substitutional Ba2%2b increases in the solid solution when the applied RF power increases, followed by a scale transformation from applied power to x parameter using the Boltzmann equation. The Ba/Sr ratio was obtained from X-ray energy dispersive spectroscopy; the comparison with the X-ray diffraction derived composition shows a remarkable coincidence while the discrepancies offer a valuable diagnosis on the sputtering flux and phase composition. The proposed method allows a quick setup of the RF cosputtering system to control film composition providing a versatile tool to optimization of the process. © 2017 J. Reséndiz-Muñoz et al.
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Barium titanate; Boltzmann equation; Deposition; Deposition rates; Energy dispersive spectroscopy; Energy gap; Magnetrons; Solid solutions; Thin films; X ray diffraction; Angular shift; Cosputtering system; Diffraction peaks; Film composition; Film deposition rates; Scale transformation; Versatile tools; X-ray energy dispersive spectroscopy; Film preparation
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