Design and fabrication of interdigital nanocapacitors coated with HfO2 Article

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Overview

abstract

• In this article nickel interdigital capacitors were fabricated on top of silicon substrates. The capacitance of the interdigital capacitor was optimized by coating the electrodes with a 60 nm layer of HfO2. An analytical solution of the capacitance was compared to electromagnetic simulations using COMSOL and with experimental measurements. Results show that modeling interdigital capacitors using Finite Element Method software such as COMSOL is effective in the design and electrical characterization of these transducers. © 2015 by the authors; licensee MDPI, Basel, Switzerland.

authors

• González Contreras Francisco Javier
• González Contreras Gabriel
• Hernández-Arriaga H.
• Kolosovas Machuca Eleazar Samuel
• López Luna Edgar

publication date

• 2015-01-01

published in

• Sensors (Switzerland)  Journal

Research

keywords

• Capacitance; Finite element method; Interdigital nanocapacitors Capacitance; Capacitors; Hafnium oxides; Electrical characterization; Electromagnetic simulation; Finite element method softwares; Inter-digital capacitors; Interdigital; Nanocapacitors; Silicon substrates; Finite element method

Identity

Digital Object Identifier (DOI)

• 10.3390/s150101998

PubMed ID

• 25602271

Additional Document Info

start page

• 1998

end page

• 2005

volume

• 15

issue

• 1