Micro reflectance difference techniques: Optical probes for surface exploration Article uri icon

abstract

  • Micro reflectance difference spectroscopy (μ-RDS) is a promising tool for the in-situ and ex-situ characterization of semiconductors surfaces and interfaces. We discuss and compare two different approaches used to measure μ-RD spectra. One is based on a charge-coupled device (CCD) camera, while the other uses a laser and a XY translation stage. To show the performance of these systems, we have measured surface optical anisotropies of GaSb(001) sample on which anisotropic strains have been generated by preferential mechanical polishing along [110] and directions. The spectrometers are complementary and the selection of one of them depends on the sample to be investigated and on experimental conditions. © 2012 WILEY-VCH Verlag GmbH %26 Co. KGaA, Weinheim.
  • Micro reflectance difference spectroscopy (μ-RDS) is a promising tool for the in-situ and ex-situ characterization of semiconductors surfaces and interfaces. We discuss and compare two different approaches used to measure μ-RD spectra. One is based on a charge-coupled device (CCD) camera, while the other uses a laser and a XY translation stage. To show the performance of these systems, we have measured surface optical anisotropies of GaSb(001) sample on which anisotropic strains have been generated by preferential mechanical polishing along [110] and directions. The spectrometers are complementary and the selection of one of them depends on the sample to be investigated and on experimental conditions. © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

publication date

  • 2012-01-01